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As high-tech applications advance, the need for vacuum solutions grows to prevent chemical reactions and contamination. Vacuum applications, including motion control, inspection, cutting, lithography, and more, face the challenge of movement.
The mover coils and stator rails of ITG’s vacuum ironless linear motors are specially designed to be used in high vacuums as low as 10-8 mbar.
Durability
Reliability
Versatility
Outgassing
Performance
| Parameter | Remarks | Symbol | Unit | ILV91-9 | ILV91-9 |
| Winding Type | N | S | |||
| Motor type, maximum voltage Phase | 3-phase permanent magnet synchronization | Vac rms (Vdc) | 230 (325) | ||
| Peak thrust @ 20°C | Magnet@25°C | Fp | N | 720 | |
Continuous Thrust Passive Cooling* | @ Tmax | Fc | N | 25 | |
Continuous Thrust Active Cooling* | @ Tmax | Fc | N | 120 | |
| Maximum Speed*** | @ 300V | Vmax | m/s | 5 | 12 |
| Motor Thrust Constant | Coils @ 20°C | K | N/Arms | 68 | 27.5 |
| Motor Constant | Coils @ 25°C | S | N2/W | 290 | |
Electrical
| Parameter | Remarks | Symbol | Unit | ILV91-9 | ILV91-9 |
| Peak Current | Magnet @ 25°C | lp | Arms | 10.6 | 26 |
| Continuous Current Passive Cooling | Coils @ Tmax | lc | Arms | 0.37 | 0.92 |
| Continuous Current Active Cooling | Coils @ Tmax | lc | Arms | 1.74 | 4.35 |
| Back EMF | Bemf | Vdc/m/s | 55.5 | 22.5 | |
| Resistance Per phase | Coils @ 25°C Ex. Cable | Rph | Ω | 5.3 | 0.85 |
| Induction Per Phase | I<0.6lp | Lph | Mh | 4.2 | 0.7 |
| Electrical Time Constant | Coil@25°C | τe | Ms | 0.8 | |
| Power Loss | All Coils | Pc | W | 59 | |
Thermal
| Parameter | Remarks | Symbol | Unit | ILV91-9 | ILV91-9 |
| The Maximum Permissible Temperature Of The Coil | Tmax | °C | 80 | ||
| Thermal R | Coils To Mount. Sfc. | Rth | °C/W | 1 | |
| Temp. Sensor | PTC 1kΩ / NTC | ||||
Mechanical
| Parameter | Remarks | Symbol | Unit | ILV91-9 | ILV91-9 |
| Coil Unit Weight | Ex. Cables | W | Kg | 0.7 | |
| Coil Unit Length | Ex. Cables | L | Mm | 280 | |
| Motor Attraction Force | Fa | N | 0 | ||
| Magnet Pitch | τ | Mm | 42 | ||
| Power Cable Type | 4*AWG20 (0.5mm²), PTFE/ETFE | ||||
| Sensor Cable Type | 4*AWG25, PTFE/ETFE | ||||
Drawing
Others
