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ILV91 Series

Elevating Precision: Navigating Vacuum Solutions for High-Tech Domains

As high-tech applications advance, the need for vacuum solutions grows to prevent chemical reactions and contamination. Vacuum applications, including motion control, inspection, cutting, lithography, and more, face the challenge of movement.

The mover coils and stator rails of ITG’s vacuum ironless linear motors are specially designed to be used in high vacuums as low as 10-8 mbar.

Performance

ParameterRemarksSymbolUnitILV91-9ILV91-9
Winding Type
NS
Motor type, maximum voltage Phase3-phase permanent magnet synchronizationVac rms (Vdc) 
230 (325)
Peak thrust @ 20°CMagnet@25°CFpN720

Continuous Thrust Passive Cooling*

@ TmaxFcN25

Continuous Thrust Active Cooling*

@ TmaxFcN120
Maximum Speed***@ 300VVmaxm/s512
Motor Thrust ConstantCoils @ 20°CKN/Arms6827.5
Motor ConstantCoils @ 25°CSN2/W290

Electrical

ParameterRemarksSymbolUnitILV91-9ILV91-9
Peak CurrentMagnet @ 25°ClpArms10.626
Continuous Current Passive CoolingCoils @ TmaxlcArms0.370.92
Continuous Current Active CoolingCoils @ TmaxlcArms1.744.35
Back EMF
BemfVdc/m/s55.522.5
Resistance Per phase Coils @ 25°C Ex. CableRphΩ5.30.85
Induction Per PhaseI<0.6lpLphMh4.20.7
Electrical Time ConstantCoil@25°CτeMs0.8
Power LossAll CoilsPcW59

Thermal

ParameterRemarksSymbolUnitILV91-9ILV91-9
The Maximum Permissible Temperature Of The Coil 
Tmax °C80
Thermal RCoils To Mount. Sfc. Rth°C/W1
Temp. Sensor



PTC 1kΩ / NTC

Mechanical

ParameterRemarksSymbolUnitILV91-9ILV91-9
Coil Unit WeightEx. CablesWKg0.7
Coil Unit Length Ex. CablesLMm280
Motor Attraction Force 
Fa0
Magnet Pitch 
τMm42
Power Cable Type 


4*AWG20 (0.5mm²), PTFE/ETFE
Sensor Cable Type


4*AWG25, PTFE/ETFE

Drawing

Drawing-91

Others

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