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ILV59 Series

Elevating Precision: Navigating Vacuum Solutions for High-Tech Domains

As high-tech applications advance, the need for vacuum solutions grows to prevent chemical reactions and contamination. Vacuum applications, including motion control, inspection, cutting, lithography, and more, face the challenge of movement.

The mover coils and stator rails of ITG’s vacuum ironless linear motors are specially designed to be used in high vacuums as low as 10-8 mbar.

Performance

ParameterRemarksSymbolUnitILV59-3ILV59-6ILV59-12
Winding Type
SSNS
Motor type, maximum voltage Phase3-phase permanent magnet synchronizationVac rms (Vdc) 
230 (325)
Peak thrust @ 20°CMagnet@25°CFpN102204408409

Continuous Thrust Passive Cooling*

@ TmaxFcN61120.420.4

Continuous Thrust Active Cooling*

@ TmaxFcN22.444.887.788.7
Maximum Speed***@ 300VVmaxm/s18.318.36.818.3
Motor Thrust ConstantCoils @ 20°CKN/Arms202047.820
Motor ConstantCoils @ 25°CSN2/W23468993

Electrical

ParameterRemarksSymbolUnitILV59-3ILV59-6ILV59-12
Peak CurrentMagnet @ 25°ClpArms5108.420
Continuous Current Passive CoolingCoils @ TmaxlcArms0.30.550.421
Continuous Current Active CoolingCoils @ TmaxlcArms1.12.21.84.35
Back EMF
BemfVdc/m/s16163916
Resistance Per phase Coils @ 25°C Ex. CableRphΩ5.82.98.51.4
Induction Per PhaseI<0.6lpLphMh1.912.80.5
Electrical Time ConstantCoil@25°CτeMs0.30.30.30.3
Power LossAll CoilsPcW2550100

Thermal

ParameterRemarksSymbolUnitILV59-3ILV59-6ILV59-12
The Maximum Permissible Temperature Of The Coil 
Tmax °C80808080
Thermal RCoils To Mount. Sfc. Rth°C/W2.41.20.6
Temp. Sensor


PTC 1kΩ / NTC

Mechanical

ParameterRemarksSymbolUnitILV59-3ILV59-6ILV59-12
Coil Unit WeightEx. CablesWKg0.150.260.5
Coil Unit Length Ex. CablesLMm79139259
Motor Attraction Force 
Fa000
Magnet Pitch 
τMm30
Power Cable Type 


I4*Leadwire AWG20 (1.5mm²), PTFE/ETFE
Sensor Cable Type


I4*Leadwire AWG26 (0.8mm²), PTFE/ETFE

Drawing

ILV59 Booklet 2D

Others

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